Inventors:
Ya-Hong Xie - Beverly Hills CA, US
Tae-Sik Yoon - Seoul, KR
Zuoming Zhao - Alhambra CA, US
Assignee:
The Regents of the University of California - Oakland CA
International Classification:
H01L 29/788
Abstract:
A phase change random access memory (PRAM) element is provided that is driven by a MOSFET. The MOSFET includes, for example, a source region, a drain region, and a gate electrode disposed between the source region and the drain region. An insulator layer (e.g., oxide layer) separates the gate electrode from contact with the region of the substrate between the source and drain regions. A first electrode contact is coupled to the drain region of the MOSFET at one end and terminates at a surface. The surface of the first electrode contact is coated with a phase change material. A second electrode contact is provided having a surface coated with a layer of phase change material. The PRAM element includes at least one columnar member formed from a phase change material interposed between the phase change material layer of the first electrode and phase change material layer of the second electrode. In certain embodiments, a plurality of columnar members are interposed between the upper and lower layers of phase change material. Each of the columnar members are separated from one another via an insulator material.
