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Wayne A Branagh

from Austin, TX
Age ~57
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Also known as:
William A Branagh
Phone and address:
11036 Tangleridge Cir, Austin, TX 78736
(512) 301-6751
Connected to:
Andrew J Branagh, 56Adam J Branam, 36Allan D Branaman, 68Anthony R Branam, 60Brandy Branam, 49Brittany Branam, 35Cyndi D Branam, 49Elizabeth R Branam, 48Greg Branam, 49Jane E Branam, 56

Wayne Branagh Phones & Addresses

  • 11036 Tangleridge Cir, Austin, TX 78736 (512) 301-6751
  • Omaha, NE
  • Bellevue, NE

Publications

Us Patents

Method And System For Identifying Etch End Points In Semiconductor Circuit Fabrication

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US Patent:
6381008, Apr 30, 2002
Filed:
May 25, 1999
Appl. No.:
09/318402
Inventors:
Wayne A. Branagh - Omaha NE
Robert C. Fry - Omaha NE
Juan C. Ivaldi - Foster City CA
Jason A. Rivers - Omaha NE
Michael R. Dyas - Omaha NE
Assignee:
SD Acquisition Inc. - Omaha NE
International Classification:
G01J 318
US Classification:
356 72, 356328, 700121
Abstract:
Disclosed is a spectrometer system with unique wavelength resolution improving relative positioning of diffraction grating and detector. Also disclosed is a modified evolving windowed factor analysis based method of detecting semiconductor etch end points which is particularly well suited for use in real time monitoring and process control. Use of wavelength group selecting mask filters is also disclosed.
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Wayne A Branagh from Austin, TX, age ~57 Get Report