Inventors:
Hongqian Sun - Boise ID, US
Jianming Zhou - Boise ID, US
Volodymyr Temchenko - Boise ID, US
Assignee:
Micron Technology, Inc. - Boise ID
International Classification:
G03B 27/52
B05D 5/06
H01S 3/04
US Classification:
355 30, 372 36, 4281951, 427162
Abstract:
Disclosed are cooling apparatus and methods of cooling a template. The cooling apparatus includes a reticle and an optical cooling material. The reticle includes patterning for at least partially reflecting patterning radiation incident on a first side of the reticle. The optical cooling material is in thermally-conductive coupling with the reticle mount and is configured to produce cooling when exposed to a laser radiation. More particularly, the optical cooling material includes a glass material that exhibits anti-Stokes fluorescence that produces cooling of the glass material when exposed to an infrared laser beam. In some embodiments, the cooling apparatus may be incorporated with a reticle mount. The reticle mount is in thermally-conductive coupling with a second side of the reticle.