Inventors:
- San Diego CA, US
Ukjin Roh - Escondido CA, US
Shashank Ekbote - San Diego CA, US
International Classification:
H01L 29/06
H01L 23/535
H01L 29/78
H01L 29/423
H01L 29/66
Abstract:
Field-Effect Transistor (FET) devices employing an adjacent asymmetric active gate/dummy gate width layout are disclosed. In an exemplary aspect, a FET cell is provided that includes a FET device having an active gate, a source region, and a drain region. The FET cell also includes an isolation structure comprising a dummy gate over a diffusion break located adjacent to one of the source region and the drain region. The FET cell has an asymmetric active gate/dummy gate width layout in that a width of the active gate is larger than a width of the adjacent dummy gate. The increased width of the active gate provides increased gate control and the decreased width of the dummy gate increases isolation from the dummy gate, thus reducing sub-threshold leakage through the dummy gate.