Inventors:
Andrew R. Wank - Avondale PA, US
Donna M. Alden - Bear DE, US
Joseph K. So - Wilmington DE, US
Robert Gargione - Middletown DE, US
Mark E. Gazze - Lincoln University PA, US
David Drop - West Grove PA, US
Mai Tieu Banh - Oakville, CA
Shawn Riley - Wilmington DE, US
Assignee:
Rohm and Haas Electronic Materials CMP Holdings, Inc. - Newark DE
International Classification:
B24D 11/00
Abstract:
The invention provides a polishing pad useful for polishing at least one of semiconductor, magnetic and optical substrates. It includes a polymeric matrix having a polishing surface. Polymeric microelements are distributed within the polymeric matrix and at the polishing surface of the polymeric matrix. Silicate-containing regions distributed within each of the polymeric microelements coat less than 50 percent of the outer surface of the polymeric microelements. Less than 0. 1 weight percent total of the polymeric microelements are associated with i) silicate particles having a particle size of greater than 5 μm; ii) silicate-containing regions covering greater than 50 percent of the outer surface of the polymeric microelements; and iii) polymeric microelements agglomerated with silicate particles to an average cluster size of greater than 120 μm.