Inventors:
Mindi Xu - Naperville IL
Richard Udischas - Joliet IL
Carol Schnepper - Tulsa OK
Joseph Paganessi - Burr Ridge IL
Assignee:
American Air Liquide, INC - Fremont CA
International Classification:
B01D 116
US Classification:
95 15, 95 18, 95 19, 95241, 95273, 96173, 96174, 96188, 96200, 96218
Abstract:
Provided is a novel system for vaporizing and purifying a gas to produce ultrapure chemical gases employed at a semiconductor processing facility. The system includes a liquified gas source, a vaporization purification bed, and a buffer tank. The liquefied gas source is in communication with the vaporization purification bed to provide a liquefied gas to the bed with an ultra-pure chemical gas generated in the purification bed. The purified gas is subsequently routed to a buffer tank and to a point of use therefrom.