US Patent:
20080261800, Oct 23, 2008
Inventors:
Jie Yuan - San Jose CA, US
Jennifer Y. Sun - Sunnyvale CA, US
Renguan Duan - San Jose CA, US
International Classification:
C04B 35/505
Abstract:
A method of fabricating doped quartz component is provided herein. In one embodiment, the doped quartz component is a yttrium doped quartz ring configured to support a substrate. In another embodiment, the doped quartz component is a yttrium and aluminum doped cover ring. In yet another embodiment, the doped quartz component is a yttrium, aluminum and nitrogen containing cover ring.