Inventors:
Lynwood W. Swanson - Portland OR
John M. Lindquist - Portland OR
Milton C. Jaehnig - Beaverton OR
Joseph Puretz - Beaverton OR
Assignee:
FEI Company - Hillsboro OR
International Classification:
H01J 3728
H01J 37317
Abstract:
A focused ion beam is directed toward a sample to be analyzed while iodine vapor is directed toward the sample. The iodine vapor, which is formed by heating solid iodine to a temperature of 30. degree. C. to 50. degree. C. , aids in sputtering of material impinged by the ion beam and in enhancing the conversion of neutral to ionic sputtered species. A quadrupole mass analyzer is positioned for receiving secondary ions sputtered from the sample whereby chemical analysis is accomplished. The iodine may be initially handled in a solid state, exhibiting a low vapor pressure, and is then heated to moderate temperatures inside a focused ion beam system without presenting a toxic hazard or requiring external plumbing.