Inventors:
HUI CHEN - Burlingame CA, US
Martin S. Kurnadi - Cupertino CA, US
Chidambara A. Ramalingam - Fremont CA, US
International Classification:
B65G 13/02
B08B 3/00
B08B 13/00
Abstract:
A drive roller for use in a semiconductor substrate cleaning system is provided. In one embodiment, a drive roller includes an outer ring having a disk-shaped body, wherein the disk-shaped body has an inner cylindrical, an upper wall, and an outer cylindrical wall defining a cavity within the disk-shaped body. An inner ring is disposed within the cavity. A groove is formed along an outer side of the inner ring. The groove faces an inner surface of the outer cylindrical wall of the outer ring.