Inventors:
Mantu K. Hudait - Portland OR, US
Mohamad A. Shaheen - Portland OR, US
Loren A. Chow - Santa Clara CA, US
Peter G. Tolchinsky - Beaverton OR, US
Joel M. Fastenau - Bethlehem PA, US
Dmitri Loubychev - Bethlehem PA, US
Amy W. K. Liu - Mountain View CA, US
Assignee:
Intel Corporation - Santa Clara CA
International Classification:
H01L 21/338
US Classification:
438172, 438 46, 438 47, 438 93, 438 94, 438191, 438938, 257190, 257200, 257201, 257615, 257E2109, 257E21097, 257E21098, 257E21108, 257E21109, 257E21112
Abstract:
A stacking fault and twin blocking barrier for forming a III-V device layer on a silicon substrate and the method of manufacture is described. Embodiments of the present invention enable III-V InSb device layers with defect densities below 1×10cmto be formed on silicon substrates. In an embodiment of the present invention, a buffer layer is positioned between a III-V device layer and a silicon substrate to glide dislocations. In an embodiment of the present invention, GaSb buffer layer is selected on the basis of lattice constant, band gap, and melting point to prevent many lattice defects from propagating out of the buffer into the III-V device layer. In a specific embodiment, a III-V InSb device layer is formed directly on the GaSb buffer.