Inventors:
Richard E. Tressler - Julian PA
Joseph Stach - State College PA
Roger L. Baeten - State College PA
Assignee:
Better Semiconductor Processes (BSP) - State College PA
International Classification:
F27D 300
F27D 500
F27B 904
F27B 914
Abstract:
An improved semiconductor wafer handling system completely eliminates the need for boats, sleds, paddles, wheeled carriers, etc. , customarily employed in transporting wafers during heat processing through the use of a plurality of rigid, polished cantilevered rods having a multiplicity of spaced slots for cooperatively holding wafers in an upright position. The system provides a means for achieving higher production yields of such semiconductor elements by generating fewer contaminating particles and through less exposure to ambient environment.