Inventors:
Joseph Pernyeszi - Scotts Valley CA
Assignee:
General Electronics Applications, Inc. - Scotts Valley CA
International Classification:
H01L 2976
Abstract:
A method and apparatus for increasing a breakdown voltage of a semiconductor device. The semiconductor device is constructed within an epitaxial tub of a first conductivity type formed within a dielectric material and comprises a surface diffusion region of a second conductivity type, opposite that of the first conductivity type, extending into the epitaxial tub, a trench surrounding and electrically isolating the epitaxial tub, a metal line coupled to the surface diffusion traversing the semiconductor device and the trench, a first field limiting diffusion region of the second conductivity type disposed between the surface diffusion region and the trench and below the metal line, a poly field plate positioned over the trench and beneath the metal line, and a first contact coupled to the field limiting diffusion region, the first contact extending below the metal line and overlapping the poly field plate.