Inventors:
Jonathan J. Keihl - Versailles OH, US
Kevin G. Herzog - Eaton OH, US
Assignee:
Lam Research Corporation - Fremont CA
International Classification:
B23H 1/00
B23H 7/26
Abstract:
An EDM spindle assembly is provided comprising a pull stud, an electrode holder, a fluid seal, and a seal holder. A threaded outside diameter of the seal holder is threadedly engaged with a threaded inside diameter of a counter bore formed in the tail end of the electrode holder. A threaded outside diameter of the pull stud is threadedly engaged with the threaded inside diameter of the counter bore. The threaded inside diameter of the counter bore in the electrode holder comprises a longitudinal threading dimension that is sufficient to accommodate the entire longitudinal threaded outside diameter of the seal holder and a portion of the longitudinal threaded outside diameter of the pull stud sufficient to create threaded engagement, with the fluid seal positioned in the seal accommodating space.