Inventors:
David M. Chen - Brookline MA, US
Jan H. Kuypers - Cambridge MA, US
Pritiraj Mohanty - Los Angeles CA, US
Klaus Juergen Schoepf - Chandler AZ, US
Guiti Zolfagharkhani - Brighton MA, US
Jason Goodelle - Boston MA, US
Reimund Rebel - Maricopa AZ, US
Assignee:
Sand 9, Inc. - Cambridge MA
International Classification:
H01L 41/053
H03B 1/00
H03B 5/32
Abstract:
Devices having piezoelectric material structures integrated with substrates are described. Fabrication techniques for forming such devices are also described. The fabrication may include bonding a piezoelectric material wafer to a substrate of a differing material. A structure, such as a resonator, may then be formed from the piezoelectric material wafer.