Inventors:
Haim Ben Hamou - Portland OR, US
Ralph N. Wall - Beaverton OR, US
Guillaume Bouche - Portland OR, US
Assignee:
Maxim Integrated Products, Inc. - Sunnyvale CA
International Classification:
H01L 41/08
H01L 41/047
Abstract:
A piezoelectric resonator includes a multi-layer top electrode configured such that a top most layer protects the underlying layers from subsequent etching, thereby preventing etch undercut of the top-most layer. In one embodiment, the multi-layer top electrode is configured as a bi-layer, so that the upper layer of the bi-layer stack protects all sides of the underlying layer from subsequent etch process steps. In an alternative embodiment, at least the perimeter of a multi-layer top electrode is completely covered with overlapping interconnect metal.