Inventors:
Waleed Asous - Allentown PA, US
Aaron Bond - Allentown PA, US
Robert Hartman - Warren Township NJ, US
Padman Parayanthal - Clinton Township NJ, US
George Przybylek - Douglasville PA, US
Gleb Shtengel - New Providence NJ, US
International Classification:
G02B006/10
H01L021/04
US Classification:
385/131000, 385/142000, 438/510000
Abstract:
A method for reducing optical loss in opto-electronic devices includes passivating P-type dopant impurities formed within various cladding and contact layer films. The passivating species is atomic hydrogen produced by a hydrogen containing plasma. The atomic hydrogen complexes with P-type dopant impurities to form electrically neutral pairs which are void of free carriers. Absorption, and loss, of the optical wave is therefore suppressed as it propagates through the P-doped layers because of the reduced free carrier concentration in the P-doped layers.