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Fransiska Living Dwikusuma

from Portland, OR
Age ~50

Fransiska Dwikusuma Phones & Addresses

  • 5326 NW Bannister Dr, Portland, OR 97229 (503) 645-2786
  • Hillsboro, OR
  • 424 Noice Dr, Salinas, CA 93906
  • 5002 Sheboygan Ave, Madison, WI 53705 (608) 270-1771
  • 5002 Sheboygan Ave #335, Madison, WI 53705 (608) 270-1771
  • 319 Island Dr, Madison, WI 53705 (608) 231-1811
  • 33 Randall Ave, Madison, WI 53715 (608) 280-8103

Resumes

Resumes

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Fransiska Dwikusuma

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Publications

Us Patents

Formation Of A Smooth Polysilicon Layer

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US Patent:
20070218639, Sep 20, 2007
Filed:
Mar 15, 2006
Appl. No.:
11/377706
Inventors:
Fransiska Dwikusuma - Portland OR, US
International Classification:
H01L 21/336
US Classification:
438287000, 438591000
Abstract:
Embodiments of the invention provide a polysilicon layer on a high-k dielectric layer with a smooth upper surface. The polysilicon layer may be formed by pretreating a wafer with a substrate, the high-k dielectric layer on the substrate and a capping layer on the high-k dielectric layer at a first temperature in a chemical vapor deposition chamber. The polysilicon layer may then be formed on the capping layer in the chemical vapor deposition chamber at a second temperature higher than the first temperature.
Fransiska Living Dwikusuma from Portland, OR, age ~50 Get Report