Inventors:
Joachim Bargon - Los Gatos CA
Edward Gipstein - Saratoga CA
Hiroyuki Hiraoka - Los Gatos CA
Assignee:
International Business Machines Corporation - Armonk NY
International Classification:
G03C 500
G03C 524
Abstract:
A process for forming an image with a positive resist using a polymer containing dimethylglutarimide units. The polymer is sensitive to both electron beam and light radiation, has a high glass transition temperature, a high temperature resistance, and is capable of very fine spatial resolution, very suitable for micro circuitry processings.