Inventors:
Dane H. Anderberg - Phoenix AZ
Lewis C. Barnett - Tempe AZ
Assignee:
Advanced Semiconductor Materials America, Inc. - Phoenix AZ
International Classification:
C03B 23023
Abstract:
A method of making a quartz dome for a reactor chamber from a substantially flat quartz disk. The quartz disk is placed on a graphite ring which is rotated. The quartz disk is heated until the disk is softened slightly and it begins to slump. The softened portion of the disk is drawn by a change in pressure to contact a fixed wiper blade. The wiper blade controls the size and shape of the deformation of the quartz disk to form the dome surface.