Inventors:
Barry J. Liles - Westborough MA, US
Colin S. Whelan - Wakefield MA, US
Assignee:
Raytheon Company - Waltham MA
International Classification:
H01L 27/108
H01L 29/94
US Classification:
257303, 257 68, 257 71, 257296, 257306, 257906, 257E21008, 257E27048, 257E27092, 257E29346, 438239, 438386, 438393, 438396
Abstract:
A method and structure for reducing cracks in a dielectric in contact with a metal structure. The metal structure comprises a first metal layer; a second metal layer disposed on, and in contact with the first metal layer, the second metal layer being stiffer than the first metal layer; a third metal layer disposed on, and in contact with the second metal layer, the second metal layer being stiffer than the third metal layer. An additional metal is included wherein the dielectric layer is disposed between the metal structure and the additional metal.