Inventors:
Barry Scott Pinheiro - Media PA
Steven Naugler - Hockessin DE
Assignee:
Rodel Holdings, INC - Wilmington DE
International Classification:
B24D 1700
Abstract:
A statistically uniform micro-texture on a polishing pad surface improves break-in preconditioning time, and is measured by: Land Surface Roughness, Ra, from about 0. 01 m to about 25 m; Average Peak to Valley Roughness, Rtm, from about 2 m to about 40 m; Core roughness depth, Rk, from about 1 to about 10; Reduced Peak Height, Rpk, from about 0. 1 to about 5; Reduced Valley Height, Rvk, from about 0. 1 to about 10; and Peak density expressed as a surface area ratio, R , ([Surf. Area/(Area-1)]), 0. 001 to 2.