US Patent:
20230056901, Feb 23, 2023
Inventors:
- Falls Church VA, US
Robert M. Young - Ellicott City MD, US
Keith H. Chung - Columbia MD, US
Andris Ezis - Ellicott City MD, US
Ishan Wathuthanthri - Baltimore MD, US
International Classification:
H01L 27/24
H01L 45/00
H01L 21/8249
Abstract:
A method of integrating a phase change switch (PCS) into a Bipolar (Bi)/Complementary Metal Oxide Semiconductor (CMOS) (BiCMOS) process, comprises providing a base structure including BiCMOS circuitry on a semiconductor substrate, and forming on the base structure a dielectric contact window layer having metal through-plugs that contact the BiCMOS circuitry. The method includes constructing the PCS on the contact window layer. The PCS includes: a phase change region, between ohmic contacts on the phase change region, to operate as a switch controlled by heat. The method further includes forming, on the contact window layer and the PCS, a stack of alternating patterned metal layers and dielectric layers that interconnect the patterned metal layers, such that the stack connects a first of the ohmic contacts to the BiCMOS circuitry and provides connections to a second of the ohmic contacts and to the resistive heater.