Phuc Van - San Jose CA, US Alexander Pravdivtsev - Mountain View CA, US
Assignee:
Ahbee 2, L.P. - San Jose CA
International Classification:
G01R031/302
US Classification:
324752, 324753, 324765
Abstract:
An apparatus and method is provided for determining the minority carrier diffusion length from the back side of the wafer within predetermined areas using pattern recognition system. In particular embodiments SPV probe includes transparent and non-transparent electrodes, to provide measurement of SPV and in area larger than optical beam and to provide accurate determination of diffusion length with spatial resolution
SPIE 7064, 70640A (2008); doi:10.1117/12.797541; Wojciech J. Walecki, Kevin Lai, Alexander Pravdivtsev, Vitali Souchkov, Phuc Van, Talal Azfar, Tim Wong, ...